PDS-160

Ion Source

The Main Features

01 Stable, fully dense films.

02 Stable plasma distribution/density.

03 High neutralisation of plasma.

04 Low temperature coating.

05 Improved adhesion.

06 Low running cost.

Specifications

Model PDS-160
Cathode Temperature 1500℃
Heater Power 3.0kW
Discharge Current 50A
Discharge Voltage 150V
Discharge Power 10kW
Partial Presure Ar 2*10⁻²pa
Partial Presure O2 4*10⁻²pa
Ion Current Density With Ar 0.5mA/cm²
Ion Current Density With Ar+O2 1mA/cm²
Ion Energy 20eV-200eV