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Ion Source
JON-16
Ion Source
Inquiry
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Service Parts
Specifications
Specifications
Model
JON-16
Anode voltage
DC 0 ～ 300V
Maximum allowable anode current
10A
Anode current range
0 ～ 10A
Cathode current range
0 ～ 10A
Filament current
0 ～ 30A
Gas flow
0 ～ 100Sccm （氧）、 0 ～ 50Sccm（氩）
Sustainable working hours
8小时（氧气）
Power supply
2.5KW
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