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Home/ Products/ Complete Machine/ Optical Thin Film Coater

JASOC 900

Optical Thin Film Coater

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Complete Machine

The Main Features Specifications Performance Utility

The Main Features

01High efficiency and environment-friendly automatic exhaust system with Cryo-pump.

02 High stability of 270 degree deflection electron beam source.

03 Large capacity six point rotary RH sources.

04 Optical thin film thickness monitoring system (800-2500nm).

05Six sensor crystal thin film thickness and deposition rate monitoring system.

06 Automatic coating process controlling system through the build-in SCS (Smart Coating System) software.

Specifications

Model JASOC 900
Vacuum Chamber SUS304, Ø900mm x 1200mm (H)
Dome Size Ø790
Dome Rotation Speed 0rpm - 60rpm (Adjustable)
Wavelength Range 400nm ~1100nm/400nm ~2400nm/800nm ~2400nm（selectable）
Crystal Thin Film Thickness Monitoring System six-point rotary vapor retardant
Ion Source Hall Ion Source or RF Ion source
Exhaust System Mechanical pump + Roots pump + Cryo pump

Performance

Item Content
Ultimate Pressure ≦7.0 x 10⁻⁵Pa
Pump Down Time (1.3 x 10⁻³Pa) ≦20min
Substrate Temperature ≦350℃

Utility

Item Content
Layout Dimensions 1250(W) x 2055mm(D) x 2430mm(H)
Power Supply ≈70KVA
Cooling Water Flow ≧80L / min
Air Pressure ≧0.5MPa
Gross Weight ≈3400Kg（Without control cabinet）
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