JASOC 1350

Optical Thin Film Coater

The Main Features

01 Two diffusion pumps combining with a Cryo-trap affords a very high efficient exhaust system.

02 Hall ion source or RF ion source and ion assisted coating, greatly improve the thin film properties and quality.

03 A high stable and reliable EB evaporation source.

04 One RH source (Multiple RH sources are optional)

05 Six sensor crystal thin film deposition controller monitors both thickness and deposition rate of the process.

06 Automatic coating process controlling system through the build-in SCS (Smart Coating System) software.


Model JASOC 1350
Vacuum Chamber SUS304, Ø1350mm x 1450mm (H)
Dome Size Ø1200mm
Dome Rotation Speed 0rpm ~ 60rpm (Adjustable)
Wavelength Range 400nm ~1100nm/400nm ~2400nm/800nm ~2400nm(selectable)
Crystal Thin Film Thickness Monitoring System IC6 & XTC/3+6 Rotary Crystal Sensors
Ion Source Hall Ion Source or RF Ion source
Exhaust System Mechanical pump + Roots pump + Cryo pump


IItem Content
Ultimate Pressure ≦7.0 x 10⁻⁵Pa
Pump Down Time (1.3 x 10⁻³Pa) ≦20min
Substrate Temperature ≦350℃


Item Content
Layout Dimensions 1570(W)x2550mm(D)x2600mm(H)
Power Supply ≈75KVA
Cooling Water Flow ≧120L / min
Air Pressure ≧0.5MPa
Gross Weight ≈4300Kg(Without control cabinet)