Aluminum Plating Sputtering Device (DC/RF)
Resistance Vacuum Evaporation Device
Complete Machine
Standard Specifications
01 The vacuum groove 1400φ (SUS304).
02 Touch screen control system is adopted : PLC Control.
03 6 inch round sputtering electrode type 8.
04 One key installation and disassembly target.
04 Dc sputtering power supply 20kw 2 sets.
05 Oil diffusion pump 26 inches 2 sets.
06 1 mechanical booster pump.
07 Oil rotary vacuum pump 10000L/min 2 sets.
08 Vacuum measuring system : Penning vacuum gauge + Pirani vacuum gauge.
Options / Others
01 Plasma polymerization (protective film) RF mechanism.
02 Remote operating mechanism : Early detection of faults.
03 Refrigerator : Polycold、Super Trap.
04 Cold water circulation unit (Outdoor type) : Cooling of power supply and pump system.