Complete Machine
Standard Specifications
01 The vacuum tank 1200 ~ 1800φ (SUS304).
02 Touch screen control system is adopted : PLC control.
03 Oil diffusion pump 26 ~ 28 inches 2 sets.
04 1 mechanical booster pump.
05 Oil rotary vacuum pump 10000L/min 2 sets.
06 Vacuum measuring system : Penning vacuum gauge + Pirani vacuum gauge.
Options / Others
01 Plasma polymerization (protective film) RF mechanism.
02 Ion spraying (bonding film) RF mechanism.
03 Remote operating mechanism : Early fault detection.
04 Refrigerator : Polycold、Super Trap.
05 Cold water circulation unit (Outdoor type) : Cooling of power supply and pump system.