Optical Thin Film Coater, Jason Vacuum

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AEM SERIES

Thin Film Coater

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Complete Machine

The Main Features Specifications Performance

The Main Features

01 The equipment is mainly used for the plating of metal film.

02 The structure of the upper and lower two chambers, high vacuum exhaust system with mechanical pump molecular pump condensate pump, to achieve oil free exhaust, high efficiency, energy saving.

03 A high stable and reliable EB evaporation source.

04 One RH source (Multiple RH sources are optional)

05 Six sensor crystal thin film deposition controller monitors both thickness and deposition rate of the process.

06 Automatic coating process controlling system through the build-in SCS (Smart Coating System) software.

Specifications

Model	AEM SERIES
Vacuum Chamber	Ø300mm x 1350mm selectable
Dome Size	Depends on the size of the cavity configuration
Dome Rotation Speed	0rpm-60rpm (Adjustable)
Crystal Thin Film Thickness Monitoring System	XTC/3+6 Crystal Sensors
Evaporation Sources	2EB Source;1 RH Sources (Multiple RH Sources Optional)
Ion Source	Hall Ion Source or RF Ion source
Exhaust System	Mechanical pump + molecular pump + condensate pump optional

Performance

IItem	Content
Vacuum property	Limiting vacuum ≦2E-5Pa
Vacuum pumping speed	The time of pumping the process chamber from the atmosphere to 5E-4Pa is ≦20 minutes
Vacuum chamber leakage rate	≦6E-3Pa·L/s

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