01 Two diffusion pumps combining with a Cryo-trap affords a very hogh efficient exhaust system.

02 Holzer ion source or RF ion source and ion assisted coating, greatly improve the thin film properties and quality.

03 A high stable and reliable EB evaporation source.

04 One RH source (Multiple RH sources are optional).

05 Six sensor crystal thin film deposition controller monitors both thickness and deposition rate of the process.

06 More than 230 PCS of Ø75mm substrates in one batch.

07 Automatic coating process controlling system through the build-in SCS (Smart Coating System) software.